Specialty gases for electronics, known as electronic specialty gases, are high-tech, high-value-added products widely used in the semiconductor and microelectronics industries. These gases primarily include hydrides, fluorides, fluorocarbons, metal-organic compounds, and others. They are essential materials in the production of ultra-large-scale integrated circuits, flat-panel display devices, compound semiconductor devices, solar cells, and optical fibers. These gases are extensively applied in processes such as thin-film manufacturing, etching, doping, chemical vapor deposition (CVD), and diffusion in integrated circuit and display panel production.

The quality of electronic specialty gases is mainly determined by their purity and cleanliness. Generally, the required purity of these gases reaches 5N-6N (N refers to the number of nines in the purity percentage, e.g., 5.7N means 99.9997%, 6N means 99.9999%). Additionally, the purification of metal elements is required to the level of 10^-9 to 10^-12. Each increase in purity level or decrease in the concentration of particles and metallic impurities significantly increases the complexity and difficulty of the production process. If the purity or cleanliness of the electronic specialty gases does not meet the standards, it can result in substandard quality of downstream products or, in severe cases, widespread contamination of the entire production line, leading to the complete scrapping of products.